Resistive devices and methods of operation thereof

ABSTRACT

In accordance with an embodiment of the present invention, a method of operating a resistive switching device includes applying a signal including a pulse on a first access terminal of an access device having the first access terminal and a second access terminal. The second access terminal is coupled to a first terminal of a two terminal resistive switching device. The resistive switching device has the first terminal and a second terminal. The resistive switching device has a first state and a second state. The pulse includes a first ramp from a first voltage to a second voltage over a first time period, a second ramp from the second voltage to a third voltage over a second time period, and a third ramp from the third voltage to a fourth voltage over a third time period. The second ramp and the third ramp have an opposite slope to the first ramp. The sum of the first time period and the second time period is less than the third time period.

This application is a divisional application of U.S. application Ser.No. 13/610,690 filed on Sep. 11, 2012, which is a continuation in partof U.S. application Ser. No. 13/470,030, filed on May 11, 2012, whichapplications are hereby incorporated herein by reference.

TECHNICAL FIELD

The present invention relates generally to electronic devices, and inparticular to resistive devices and methods of operation thereof.

BACKGROUND

Semiconductor industry relies on device scaling to deliver improvedperformance at lower costs. Flash memory is the mainstream non-volatilememory in today's market. However, Flash memory has a number oflimitations that is posing a significant threat to continued advancementof memory technology. Therefore, the industry is exploring alternativememories to replace Flash memory. Contenders for future memorytechnology include magnetic storage random access memory (MRAM),ferroelectric RAM (FeRAM), and resistive switching memories such asphase change RAM (PCRAM), resistive RAM (RRAM), ionic memories includingprogrammable metallization cell (PMC) or conductive bridging randomaccess memory (CBRAM). These memories are also called as emergingmemories.

To be viable, the emerging memory has to be better than Flash memory inmore than one of technology metrics such as scalability, performance,energy efficiency, On/Off ration, operational temperature, CMOScompatibility, and reliability. CBRAM technology has shown promisingresults in many of these technology metrics.

SUMMARY OF THE INVENTION

In accordance with an embodiment of the present invention, a method ofoperating a resistive switching device comprises applying a signalcomprising a pulse on a first access terminal of an access device havingthe first access terminal and a second access terminal. The secondaccess terminal is coupled to a first terminal of a two terminalresistive switching device. The resistive switching device has the firstterminal and a second terminal. The resistive switching device has afirst state and a second state. The pulse comprises a first ramp from afirst voltage to a second voltage over a first time period, a secondramp from the second voltage to a third voltage over a second timeperiod, and a third ramp from the third voltage to a fourth voltage overa third time period. The second ramp and the third ramp have an oppositeslope to the first ramp. The sum of the first time period and the secondtime period is less than the third time period.

In accordance with an alternative embodiment of the present invention, amethod of operating a memory cell comprises applying a select pulse at agate of a select transistor having a first node and a second node. Thememory cell comprises a resistive switching device having a firstterminal and a second terminal and an access device having a firstaccess terminal and a second access terminal. The second access terminalis coupled to the first terminal of the resistive switching device. Thefirst node is coupled to the first access terminal of the access device,and the second node is coupled to a bit line potential node. The methodfurther comprises charging a capacitor having a first plate and a secondplate. The first plate is coupled to the first node of the selecttransistor and to the first access terminal of the access device duringthe select pulse. The method further comprises activating the accessdevice after charging the capacitor, deactivating the select transistorafter activating the access device, and discharging the chargedcapacitor through the resistive switching device.

In accordance with an alternative embodiment of the present invention, asemiconductor device comprises a two terminal resistive switching devicehaving a first terminal and a second terminal and having a first stateand a second state. The semiconductor device comprises an access devicehaving a first access terminal and a second access terminal coupled tothe first terminal of the resistive switching device and a signalgenerator configured to generate a signal comprising a pulse. The pulsecomprises a first ramp from a first voltage to a second voltage over afirst time period, a second ramp from the second voltage to a thirdvoltage over a second time period, and a third ramp from the thirdvoltage to a fourth voltage over a third time period. The second rampand the third ramp have an opposite slope to the first ramp. The sum ofthe first time period and the second time period is less than the thirdtime period. The semiconductor device further comprises an accesscircuit configured to apply the signal on the first access terminal. Theresistive switching device is configured to change from the first stateto the second state in response to the signal.

In accordance with an alternative embodiment of the present invention, amethod of operating a resistive switching device comprises applying asignal comprising a pulse on a first terminal of a two terminalresistive switching device having the first terminal and a secondterminal. The resistive switching device has a first state and a secondstate. The pulse comprises a first ramp from a first voltage to a secondvoltage over a first time period, a second ramp from a third voltage tothe first voltage over a second time period, and a third ramp from afourth voltage to the third voltage. The first time period is at least0.1 times a total time period of the pulse. The first ramp and thesecond ramp have a ramp rate opposite to a ramp rate of the third ramp.

In accordance with an alternative embodiment of the present invention, amethod of operating a resistive switching device comprises applying asignal comprising a pulse on a first terminal of a two terminalresistive switching device having the first terminal and a secondterminal. The resistive switching device has a first state and a secondstate. The pulse comprises a first ramp from a first voltage to a secondvoltage over a first time period, a second ramp from the second voltageto a third voltage over a second time period, and a third ramp from thethird voltage to a fourth voltage over a third time period. The secondramp and the third ramp have an opposite slope to the first ramp. Thesum of the first time period and the second time period is less than thethird time period.

BRIEF DESCRIPTION OF THE DRAWINGS

For a more complete understanding of the present invention, and theadvantages thereof, reference is now made to the following descriptionstaken in conjunction with the accompanying drawing, in which:

FIG. 1, which includes FIGS. 1A-1E, illustrates a cross-sectional viewand operation of a resistive switching memory, wherein FIG. 1Aillustrates a cross-sectional view of a conventional ionic memory,wherein FIG. 1B illustrates the memory under a programming operation,wherein FIG. 1D illustrates a timing diagram of the correspondingprogramming pulse, wherein FIG. 1C illustrates the memory under an eraseoperation, and wherein FIG. 1E illustrates a timing diagram of thecorresponding erase pulse;

FIG. 2, which includes FIGS. 2A-2F, illustrates timing diagramshighlighting the programming pulse applied to a memory unit inaccordance with embodiments of the invention;

FIG. 3, which includes FIGS. 3A-3F, illustrates timing diagram of anerase operation highlighting the erase pulses in accordance withembodiments of the invention;

FIG. 4, which includes FIGS. 4A-4B, illustrates a memory cell inaccordance with embodiments of the invention;

FIG. 5, which includes FIGS. 5A-5B, illustrates timing diagrams ofprogram operations highlighting the program pulses asserted at a wordline and at a bit line, wherein FIG. 5A illustrates a conventionalprogramming pulse and wherein FIG. 5B illustrates a program pulse inaccordance with embodiments of the invention;

FIG. 6, which includes FIGS. 6A-6B, illustrates timing diagrams of eraseoperations highlighting the erase pulses at a word line andcorresponding bit line and/or select line, wherein FIG. 6A illustrates aconventional erase pulse and wherein FIG. 6B illustrates an erase pulsein accordance with embodiments of the invention;

FIG. 7, which includes FIGS. 7A-7B, illustrates a memory cell andcorresponding program/erase operation in accordance with embodiments ofthe invention;

FIG. 8, which includes FIGS. 8A and 8B, illustrates various memory cellarray implementing embodiments of the invention; and

FIG. 9, which includes FIGS. 9A-9B, illustrates a memory deviceimplementing embodiments of the invention.

Corresponding numerals and symbols in the different figures generallyrefer to corresponding parts unless otherwise indicated. The figures aredrawn to clearly illustrate the relevant aspects of the embodiments andare not necessarily drawn to scale.

DETAILED DESCRIPTION OF ILLUSTRATIVE EMBODIMENTS

The making and using of various embodiments are discussed in detailbelow. It should be appreciated, however, that the present inventionprovides many applicable inventive concepts that can be embodied in awide variety of specific contexts. The specific embodiments discussedare merely illustrative of specific ways to make and use the invention,and do not limit the scope of the invention.

The present invention will be described with respect to variousembodiments in a specific context, namely ionic memories such asconductive bridging memories. The invention may also be applied,however, to other types of memories, particularly, to any resistivememory such as two terminal resistive memories. Although describedherein for a memory device, the embodiments of the invention may also beapplied to other types of devices formed by resistive switching such asprocessors, dynamically-reroutable electronics, optical switches,field-programmable gate arrays, and microfluidic valves as well as othernanoionic devices.

FIG. 1, which includes FIGS. 1A-1E, illustrates cross-sectional view andoperation of a resistive switching memory, wherein FIG. 1A illustrates across-sectional view of a conventional ionic memory, wherein FIG. 1Billustrates the memory under a programming operation, wherein FIG. 1Dillustrates a timing diagram of the corresponding programming pulse,wherein FIG. 1C illustrates the memory under an erase operation, andwherein FIG. 1E illustrates a timing diagram of the corresponding erasepulse.

FIG. 1A illustrates a memory unit 10 having a variable resistance layer30 placed between a first conductive layer 20 and a second conductivelayer 40. The variable resistance layer 30 may be a solid electrolytelayer that is programmable, for example, by the application of externalstimuli such as electric potential, heat, magnetic field, and others. Inother words, the resistance across the variable resistance layer 30 maybe changed by the application of a program operation and a correspondingerase operation. For example, after a program operation, the variableresistance layer 30 has a low resistance (ON state) whereas after anerase operation, the variable resistance layer 30 has a high resistance(OFF state). The operation of the memory cell involves nano-scalemigration and rearrangement of conductive atoms such as metal atomsthrough the variable resistance layer 30. Alternatively, the memory cellmay operate due to the motion of defects such as point defects withinthe variable resistance layer 30. The program/erase operations may beperformed by applying an electrical signal between a first node 1 and asecond node 2.

As illustrated in FIG. 1A, nanophases 50 may be disbursed within thevariable resistance layer 30. In some embodiments, the nanophases 50 maybe conductive. However, the resistivity of this variable resistancelayer 30 in the OFF state is high, for example, greater than 500 MΩ anddepends on the cell area. The resistivity state of the memory cell canbe read by applying a read voltage between the first and the secondnodes 1 and 2. However, the read voltage is negligible (typically about−200 mV to about 200 mV) and does not change the state of the memorycell.

FIG. 1B illustrates the memory unit during a conventional programoperation. The programming operation may be accomplished using a staticvoltage or a dynamic pulse. Typically programming is performed using aprogramming pulse as illustrated in FIG. 1D, which illustrates thepotential difference applied between the first node 1 and the secondnode 2.

When a positive voltage is applied across the first and the second nodes1 and 2 as illustrated in FIGS. 1B and 1D, conductive atoms from thesecond conductive layer 40 may be oxidized forming conductive ions,which are then accelerated due to the electric field in the variableresistance layer 30. The programming pulse, e.g., depending on thevariable resistance layer 30, may have a potential V_(PROG) higher thanthe threshold voltage, which is about 300 mV or higher and typicallyabout 450 mV in one example. For example, the programming pulse may havea potential V_(PROG) of about 1 V to about 1.5V. The conductive ionsdrift towards the first conductive layer 20, which may be the cathode.Within the variable resistance layer 30, the conductive ions may migrateusing nanophases 50, which may absorb a drifting conductive ion andrelease the same or another conductive ion. Eventually, a conductive ionclose to the first conductive layer absorbs an electron from the secondnode 2 and is reduced back to a conductive atom. The reduced conductiveatom is deposited over the first conductive layer 20. During theprogramming pulse, more and more conductive ions are brought from thesecond conductive layer 40 to the first conductive layer 20, whicheventually results in the formation of a conductive filament within thevariable resistance layer 30. The flow of the conductive ions alsoresults in the flow of the programming current I_(PROG) through thevariable resistance layer 30. After the bridging of the first conductivelayer 20 with the second conductive layer 40 through the variableresistance layer 30, the resistivity of the variable resistance layer 30drops significantly and may be measured/read using a read operation.

FIG. 1C illustrates the memory unit during a conventional eraseoperation. The erase operation may be accomplished using a staticvoltage or a dynamic pulse. Typically erasure is performed using anerase pulse as illustrated in FIG. 1E, which illustrates the potentialdifference applied between the first node 1 and the second node 2.

When a negative voltage is applied across the first and the second nodes1 and 2 as illustrated in FIGS. 1C and 1E, conductive atoms in theconductive filament formed previously get oxidized to conductive ions,which drift to the second conductive layer 40 due to the electric field.At the second conductive layer 40, these conductive ions absorbelectrons from the first node 1 and are reduced to conductive atomsreforming the initial high resistivity state. The flow of the conductiveions towards the second conductive layer 40 results in the flow of theerase current I_(ERASE) through the variable resistance layer 30. Unlikethe second conductive layer 40, the first conductive layer 20 is inertand therefore does not contribute conductive atoms. Therefore, the eraseprocess terminates upon the relocation of all the conductive atomswithin the variable resistance layer 30. In one embodiment, the erasepulse may have a potential V_(ERASE) less than about −200 mV (morenegative), for example, about −1V.

As illustrated above, the programming and erase pulse are stepfunctions, where the pulse voltage is abruptly changed from the lowstate (e.g., 0V) to a high state (e.g., V_(PROG)). In other words,programming and erase are conventionally performed using a series ofsquare/rectangular pulses. As will be described in FIGS. 2 and 4,embodiments of the invention use a different voltage pulse forprogramming and erasing the memory unit.

FIG. 2, which includes FIGS. 2A-2F, illustrates timing diagramshighlighting the programming pulse applied to a memory unit inaccordance with embodiments of the invention.

FIG. 2A illustrates a timing diagram showing a ramped up voltage pulseapplied between the first and the second nodes of the memory unit inaccordance with an embodiment of the invention.

In accordance with an embodiment of the invention, the potentialdifference across the first and the second nodes 1 and 2 is increased toa peak voltage, which may be the same as the conventional square pulse.Thus, the first node 1 is at a higher (positive) potential than thesecond node 2 due to the applied pulse.

However, as illustrated, the voltage is not abruptly decreased afterreaching the peak programming voltage as in conventional programming.Rather, the program voltage (V_(PROG)) is slowly ramped down from a peakprogramming voltage PPV. As illustrated in FIG. 2A, the ramp downvoltage follows an exponential or a parabolic rate in one or moreembodiments.

In the illustrated embodiment of FIG. 2A, the programming pulse isabruptly (or quickly) ramped up to the peak programming voltage PPV,ramped down quickly to lower voltages, and then slowly ramped down to ahold voltage.

The programming pulse may have a peak programming voltage PPV of atleast 500 mV in various embodiments. In one or more embodiments, thepeak programming voltage PPV is at least 1 V. In one or moreembodiments, the peak programming voltage PPV is about 750 mV to about1000 mV. In one or more embodiments, the peak programming voltage PPV isabout 1 V to about 1.5 V. In one or more embodiments, the peakprogramming voltage PPV is about 1.5 V to about 2 V. In one or moreembodiments, the peak programming voltage PPV is about 2 V to about 2.5V.

The programming pulse may have a program pulse width t_(PW) of at least0.01 μs in various embodiments. In one or more embodiments, the programpulse width t_(PW) is at least 0.02 μs. In one or more embodiments, theprogram pulse width t_(PW) is about 0.01 μs to about 1 μs. In one ormore embodiments, the program pulse width t_(PW) is about 0.04 μs toabout 0.08 μs. In one or more embodiments, the program pulse widtht_(PW) is about 0.06 μs. In some embodiments, the program pulse widtht_(PW) may be more than 0.01 μs but less than 100 μs.

In various embodiments, the programming voltage comprises an initialportion over which the potential is quickly ramped to the peakprogramming voltage. In various embodiments, the programming voltage maybe reached within 10 ns. In one or more embodiments, the programmingvoltage may be reached within 1 ns. In one or more embodiments, theprogramming voltage may be reached within 0.5 ns to about 10 ns. In oneor more embodiments, the programming voltage may be reached within 1 nsto about 5 ns.

In various embodiments, the programming voltage has no hold time at thepeak program voltage. In other words, after reaching the peak programvoltage, the program voltage is immediately pulled down. In variousembodiments, the hold time at the peak program voltage may be less than10 ns. In one or more embodiments, the hold time at the peak programvoltage may be less than 1 ns. In one or more embodiments, the hold timeat the peak program voltage may be less than 0.1 ns. In one or moreembodiments, the hold time at the peak program voltage may be between0.1 ns to 1 ns. In one or more embodiments, the hold time at the peakprogram voltage may be less than 1% of the total pulse width t_(PW). Inone or more embodiments, the hold time at the peak program voltage maybe between 0.1% of the total pulse width t_(PW) to 1% of the total pulsewidth t_(PW).

In various embodiments, the programming voltage comprises anintermediate portion over which the potential is quickly reduced fromthe peak programming voltage. In various embodiments, the programmingvoltage is reduced within a time that is less than 20% of the totalpulse width t_(PW). In one or more embodiments, the programming voltageis reduced within a time that is less than 10% of the total pulse widtht_(PW). In one or more embodiments, the programming voltage is reducedwithin a time that is between 1% of the total pulse width t_(PW) toabout 20% of the total pulse width t_(PW). In one or more embodiments,the programming voltage is reduced within a time that is between 5% ofthe total pulse width t_(PW) to about 10% of the total pulse widtht_(PW).

In various embodiments, the programming voltage comprises a finalportion over which the potential is slowly decreased. In variousembodiments, the programming voltage may be decreased at a rate slowerthan about 100 mV/μs. In particular, the ramp-down profile has a firstportion at higher voltage and a second portion, which is a low voltagephase LVP.

In various embodiments, the ramp-down profile of the programming pulsemay be modified to any suitable profile. In particular, the low voltagephase LVP may be modified to increase or decrease the ramp ratedepending on the programming characteristic of the memory unit. Invarious embodiments, a ratio of the time period of the LVP (t_(LVP)) isat least 10% of the total pulse width t_(PW). In various embodiments, aratio of the time period of the LVP (t_(LVP)) is at least 50% of thetotal pulse width t_(PW). In various embodiments, a ratio of the timeperiod of the LVP (t_(LVP)) is between about 10% to about 50% of thetotal pulse width t_(PW). In various embodiments, a ratio of the timeperiod of the LVP (t_(LVP)) is between about 50% to about 100% of thetotal pulse width t_(PW). Examples of such modifications will bedescribed using FIGS. 2B-2F in accordance with various embodiments ofthe invention.

Further, FIG. 2A illustrates an embodiment of the invention including anexponential ramp-down profile during the low voltage phase (LVP) appliedbetween the first and the second nodes of the memory unit (e.g. FIG.1B). As illustrated in FIG. 2B, the exponential is a slow exponential inone or more embodiments such that the programming voltage is below halfthe peak programming voltage PPV after about half the width of theprogramming pulse t_(PW). As only an illustration, the programmingvoltage (PV) during the low voltage phase may follow an exponential suchas PV(t)=PVP*(1-exp(−t/RC)) , where PVP is the peak programming voltage,t is the time, RC is a RC time constant (e.g., product of resistance andcapacitance).

FIG. 2B illustrates a programming pulse applied between the first andthe second nodes of the memory unit in accordance with anotherembodiment. In accordance with an embodiment, the ramp up phase (RUP)comprises a linear portion during which the programming voltageincreases linearly. In one embodiment, the programming voltage increaseslinearly as PV(t)=(PVP×t/(t_(PW)−t₀)), where PVP is the peak programmingvoltage, t is the time, t_(PW) is the width of the pulse, and t₀ may beabout 0.85 t_(PW) to about 0.995 t_(PW). In alternative embodiments, theprogramming voltage may increase through a plurality of linear steps. Asillustrated in FIG. 2B, after reaching the peak programming voltage, thevoltage ramps down quickly as described above and decays slowly over alonger time.

FIG. 2C illustrates a programming pulse applied between the first andthe second nodes of the memory unit in accordance with anotherembodiment. In this embodiment, the ramp-up program voltage may benon-linear, for example, exponential in one embodiment. In anotherembodiment, the ramp-up program voltage may be parabolic.

FIG. 2D illustrates a programming pulse applied between the first andthe second nodes of the memory unit in accordance with anotherembodiment.

In this embodiment, a program pulse may comprise a superposition of aplurality of pulses. For example, a square pulse may be superimposedwith another shorter square pulse of higher voltage in one embodiment(FIG. 2D). In an alternative embodiment, an exponential pulse may besuperimposed with a square low voltage pulse (FIG. 2E).

FIG. 2F illustrates a linear programming pulse applied between the firstand the second nodes of the memory unit in accordance with anotherembodiment. For example, in an intermediate portion, the program voltageis dropped quickly while in a final portion, the program voltage isslowly reduced. As illustrated, the program voltage is rapidly linearlyincreased during a ramp up portion (RUP) to the peak program voltage.After reaching the peak program voltage, the program voltage is rapidlylinearly decreased during a high voltage portion (HVP) after which theprogram voltage is slowly linearly decreased during a low voltageportion (LVP). In further embodiments, the program pulse may comprisesuperposition of multiple linear, square, exponential, parabolic ramps.

In various embodiments, the embodiments described in FIGS. 2A-2F may becombined together.

As explained above in various embodiments, the program pulse has atleast four characteristics: a fast ramp up portion to the peak programvoltage, minimal hold time at the peak program voltage, a fast ramp downfrom the peak program voltage, and a slow ramp down over a low voltageportion. Advantageously, the application of the fast, higher energypulse rapidly forms the low resistive memory state (e.g., forms theconductive filament in the memory unit 10). This way, the probability ofgenerating multiple filaments in one device decreases.

FIG. 3, which includes FIGS. 3A-3F, illustrates timing diagram of anerase operation highlighting the erase pulses in accordance withembodiments of the invention.

FIGS. 3A-3F illustrate timing diagrams showing a ramped voltage erasepulse applied between the first and the second nodes of the memory unitin accordance with an embodiment of the invention. In accordance with anembodiment of the invention, the potential difference across the firstand the second nodes 1 and 2 is lowered to a peak voltage. Thus, similarto FIG. 1C, the first node 1 is at a lower (negative) potential than thesecond node 2 due to the applied pulse.

However, as illustrated in various embodiments, the erase voltage is notabruptly increased and decreased as in conventional erasing. Rather, theerase voltage (V_(ERASE)) is quickly ramped down to a peak erase voltagePEV. As illustrated in FIG. 3A, the ramp-down voltage may be abruptlyramped down in an initial portion of the erase pulse in one embodiment.In the illustrated embodiment of FIG. 3A, the erase pulse is quicklyramped up from the peak erase voltage PEV to an intermediate erasevoltage within a short ramp up time (ER_(rd)). Then, over a longer timethe erase voltage is ramped up to the hold voltage. Thus, a low erasevoltage is applied for a longer time over a low voltage portion (LVP)while the memory cell is exposed for a shorter time around the peakerase voltage.

The erase pulse may have a peak erase voltage PEV of at least −200 mV invarious embodiments. In one or more embodiments, the peak erase voltagePEV is at least −1 V. In one or more embodiments, the peak erase voltagePEV is about −750 mV to about −1 V. In one or more embodiments, the peakerase voltage PEV is about −1 V to about −1.5 V. In one or moreembodiments, the peak erase voltage PEV is about −1.5 V to about −2 V.In one or more embodiments, the peak erase voltage PEV is about −2 V toabout −3 V.

The erase pulse may have a pulse width of at least 0.1 μs in variousembodiments. In one or more embodiments, the pulse width of at least 1μs. In one or more embodiments, the pulse width is about 1 μs to about10 μs. In one or more embodiments, the pulse width is about 2.5 μs toabout 7.5 μs. In one or more embodiments, the pulse width is about 5 μsto about 15 μs.

In various embodiments, the erase voltage comprises an initial portionover which the potential is quickly ramped down to the peak erasevoltage. In various embodiments, the erase voltage may be reached within10 ns. In one or more embodiments, the erase voltage may be reachedwithin 1 ns. In one or more embodiments, the erase voltage may bereached within 0.5 ns to about 10 ns. In one or more embodiments, theerase voltage may be reached within 1 ns to about 5 ns.

In various embodiments, the erase voltage has no hold time at the peakerase voltage. In other words, after reaching the peak erase voltage,the erase voltage is immediately pulled up. In various embodiments, thehold time at the peak erase voltage may be less than 10 ns. In one ormore embodiments, the hold time at the peak erase voltage may be lessthan 1 ns. In one or more embodiments, the hold time at the peak programvoltage may be less than 0.1 ns. In one or more embodiments, the holdtime at the peak erase voltage may be between 0.1 ns to 1 ns. In one ormore embodiments, the hold time at the peak erase voltage may be lessthan 1% of the total pulse width t_(PW). In one or more embodiments, thehold time at the peak erase voltage may be between 0.1% of the totalpulse width t_(PW) to 1% of the total pulse width t_(PW).

In various embodiments, the erase voltage comprises an intermediateportion over which the potential is quickly increased from the peakerase voltage. In various embodiments, the erase voltage is increasedwithin a time that is less than 20% of the total pulse width t_(PW). Inone or more embodiments, the erase voltage is increased within a timethat is less than 10% of the total pulse width t_(PW). In one or moreembodiments, the erase voltage is increased within a time that isbetween 1% of the total pulse width t_(PW) to about 20% of the totalpulse width t_(PW). In one or more embodiments, the erase voltage isincreased within a time that is between 5% of the total pulse widtht_(PW) to about 10% of the total pulse width t_(PW).

In various embodiments, the erase voltage comprises a final portion overwhich the potential is slowly increased. In various embodiments, theerase voltage may be increased at a rate slower than about 100 mV/μs. Inparticular, the ramp-up profile from the peak erase voltage has a firstportion at higher voltage and short time and a second portion, which isa low voltage portion (LVP) for a longer time.

In various embodiments, the ramp-up profile of the erase pulse may bemodified to any suitable profile. In particular, the low voltage phaseLVP may be modified depending on the programming characteristic of thememory unit. In various embodiments, a ratio of the time period of theLVP (t_(LVP)) is at least 10% of the total pulse width t_(PW). Invarious embodiments, a ratio of the time period of the LVP (t_(LVP)) isat least 50% of the total pulse width t_(PW). In various embodiments, aratio of the time period of the LVP (t_(LVP)) is between about 10% toabout 50% of the total pulse width t_(PW). In various embodiments, aratio of the time period of the LVP (t_(LVP)) is between about 50% toabout 95% of the total pulse width t_(PW).

As illustrated in FIG. 3A, the erase voltage (EV) during the firstportion (low voltage phase LVP) may follow a slow exponential in one ormore embodiments such that the erase voltage is less than half the peakerase voltage PEV. As only an illustration, the erase voltage (EV)during the low voltage phase (LVP) may follow an exponential such asEV(t)=PEV(1−exp(t/RC)), where PEV is the peak erase voltage (which isnegative), t is the time, RC is a time constant.

Examples of further modifications will be described using FIGS. 3B-3F inaccordance with various embodiments of the invention.

FIG. 3B illustrates an embodiment of the invention including a linearramp-down profile applied between the first and the second nodes of thememory unit.

In accordance with an embodiment, the ramp up phase (RDP) comprises alinear portion during which the programming voltage decreases linearly.In one embodiment, the erase voltage decreases linearly asEV(t)=(PEV×t/(t_(PW)−t₀)), where PVP is the peak programming voltage(which is negative), t is the time, t_(PW) is the width of the pulse,and t₀ may be about 0.85 t_(PW) to about 0.995 t_(PW). In alternativeembodiments, the programming voltage may decrease through a plurality oflinear steps. As illustrated in FIG. 2B, after reaching the peakprogramming voltage, the voltage ramps up quickly as described above anddecays slowly over a longer time.

FIG. 3C illustrates an erase pulse applied between the first and thesecond nodes of the memory unit in accordance with another embodiment.In this embodiment, the ramp-down of the erase voltage may benon-linear, for example, exponential in one embodiment. In anotherembodiment, the ramp-down of the erase voltage may be parabolic.

FIG. 3D illustrates an erase pulse applied between the first and thesecond nodes of the memory unit in accordance with another embodiment.

In this embodiment, the erase pulse may comprise a superposition of aplurality of pulses. For example, a square pulse may be superimposedwith another shorter square pulse of higher voltage in one embodiment(FIG. 3D). In an alternative embodiment, an exponential pulse may besuperimposed with a square low voltage pulse (FIG. 3E).

FIG. 3F illustrates a linear erase pulse applied between the first andthe second nodes of the memory unit in accordance with anotherembodiment. For example, in an intermediate portion, the erase voltageis increased quickly while in a final portion, the erase voltage isslowly reduced. As illustrated, the erase voltage is rapidly linearlydecreased during a ramp down portion (RDP) to the peak erase voltage.After reaching the peak erase voltage, the erase voltage is rapidlylinearly increased during a high voltage portion (HVP) after which theprogram voltage is slowly linearly decreased during a low voltageportion (LVP). In further embodiments, the erase pulse may comprisesuperposition of multiple linear, square, exponential, parabolic ramps.In various embodiments, the embodiments described in FIGS. 3A-3F may becombined together.

As explained above in various embodiments, the erase pulse has at leastfour characteristics: a fast ramp down portion to the peak erasevoltage, minimal hold time at the peak erase voltage, a fast ramp upfrom the peak erase voltage, and a slow ramp up over a low voltageportion.

Advantageously, the application of the fast, higher energy pulse rapidlybreaks the memory state (e.g., breaks the conductive filament in thememory unit 10). However, immediately after the filament is broken, alarge potential is dropped between the broken filaments. This high fieldregion can result in a permanent break down of the solid electrolyte(dielectric material separating the broken filaments). Therefore, a lowvoltage portion is used to finish breaking up the filaments withoutdamaging the solid electrolyte layer. Further, the low voltage portionmay help to clean up clusters and other agglomerates as well asfilaments that require longer erase times. Such imperfections within thesolid electrolyte may otherwise increase the statistical spread of theerase process.

FIG. 4, which includes FIGS. 4A-4B, illustrates a memory cell inaccordance with embodiments of the invention.

The memory cell 15 may be a one access device and one memory unit (1-AD1-MU) memory cell in one embodiment. The memory cell 15 may be connectedthrough word lines WL, bit lines BL, and select lines SL to plurality ofsimilar memory cells thereby forming a memory array. A memory cell 15comprises the memory unit 10 described in various embodiments of thepresent application. The memory unit 10 may comprise resistive switchingmemories that switch based on thermal, electrical, and/orelectromagnetic effects.

The memory unit 10 may comprise an ionic memory in one or moreembodiments. Such ionic memory may involve cells based on anionmigration or cation migration. An example of an ionic memory includes aconductive bridging random access memory. The CBRAM may comprise a solidelectrolyte layer sandwiched between an inert electrode and anelectro-chemically active electrode. The solid electrolyte layer maycomprise a chalcogenide material such as a germanium based chalcogenidesuch as GeS₂. In various embodiments, the solid electrolyte layer maycomprise copper doped WO₃, Cu/Cu₂S, Cu/Ta₂O₅, Cu/SiO₂,Ag/Zn_(x)Cd_(1-x)S, Cu/Zn_(x)Cd_(1-x)S, Zn/Zn_(x)Cd_(1-x)S, GeTe, GST,As—S, Zn_(x)Cd_(1-x)S, TiO₂, ZrO₂, SiO₂. In some embodiments, the solidelectrolyte 60 may comprise a plurality of layers and may includebilayers such as Ge_(x)Se_(y)/SiO_(x), Ge_(x)Se_(y)/Ta₂O₅,Cu_(x)S/Cu_(x)O, Cu_(x)S/SiO₂ and combinations thereof. Theelectro-chemically active electrode may comprise silver, copper, zinc,and/or copper-tellurium in various embodiments.

In another embodiment, the memory unit 10 may comprise a RRAM, e.g.,based on metal oxides in some embodiments. The memory unit 10 maycomprise a phase change memory unit in alternative embodiments.

Referring to FIG. 4A, the memory unit 10 is disposed between a firstnode 1 (e.g., anode) and a second node 2 (e.g., cathode). The first node1 is coupled to the select line SL while the second node 2 is coupled toa bit line BL through an access device 100.

In various embodiments, the access device 100 may comprise a switchingdevice. In one embodiment, the access device 100 is a diode. In analternate embodiment, the access device 100 is a transistor. The accessdevice 100 may provide a conductive path from the second node 2 to thebit line BL. The access device 100 may be enabled or controlled usingthe word line WL (as well as the bit line BL and the select line SL).The word line WL may be coupled to a word line driver (WLD) 110, whichmay be commonly shared with a plurality of memory cells sharing a commonword line WL. As will be described, the WLD 110 may drive the word lineusing one or more of the potential pulse profiles described in variousembodiments.

Similarly, the bit line BL may be coupled or driven by a bit line driverBLD 120 and the select line SL may be coupled to a select line driverSLD 130. The BLD 120 and the SLD 130 may be commonly shared over aplurality of memory cells sharing a common bit line or a common selectline. As will be described, the BLD 120 and/or the SLD 130 may drive thebit line and select line respectively using one or more of the pulseprofiles described in various embodiments.

FIG. 4B illustrates a memory cell comprising a transistor and a memoryunit in accordance with an embodiment of the invention.

In this embodiment, the access device 100 is a transistor. Thetransistor may be a metal insulator field effect transistor in oneembodiment. In other embodiments, the transistor may be other types oftransistors including bipolar transistors. The memory cell 15 may be aone transistor and one memory unit (1-T 1-MU) memory cell in oneembodiment. As illustrated in FIG. 4B, the gate of the access device 100is coupled to a word line WL. A first source/drain node of the accessdevice 100 is coupled to a bit line BL while a second source/drain nodeof the access device 100 is coupled to the memory unit through thesecond node 2. Thus, the memory unit 10 is coupled to the bit line BLthrough a channel region of the access device 100.

As will be described in FIGS. 5-7, the embodiments of the inventiondescribed above with respect to FIGS. 2-3 may be implemented to a memorycell by applying ramped pulses to one or more nodes of the memory cell.

FIG. 5, which includes FIGS. 5A-5B, illustrates timing diagrams ofprogram operations highlighting the program pulses asserted at a wordline and a bit line, wherein FIG. 5A illustrates a conventionalprogramming pulse and wherein FIG. 5B illustrates a program pulse inaccordance with embodiments of the invention.

The program pulses illustrated in FIG. 5 may be applied to the memorycells described in FIG. 4. During the programming of the memory unit 10,the bit line BL may be grounded while the select line is pulled up to apositive potential. Alternatively, in some embodiments, the select lineSL may be grounded and the bit line BL may be pulled down to a negativepotential. The word line WL of the access device 100 is enabled toturn-on the access device 100, which eventually turns on (pushes to thelow resistance state) the memory unit 10. For example, for enabling anaccess device comprising an n-channel field effect transistor, apositive bias is applied on the word line WL.

The voltage on the select line V_(SL) and the voltage on the word lineV_(WL) for a pulse in a series of pulses are illustrated in FIG. 5.Although in various embodiments a plurality of pulses may be used forthe program and erase operations, FIG. 5 illustrates a single pulse forclarity. The embodiments described in FIG. 5 may apply the variousembodiments described in FIG. 2.

A conventional programming pulse is illustrated in FIG. 5A. As shown inFIG. 5A, the select line SL and the word line WL are pulled up, forexample, to a program voltage V_(PROG). As described previously, inconventional programming, the program voltage V_(PROG) is rampedabruptly (near infinite slope) and the word line WL and the select lineSL may be asserted at the same time. As illustrated, the leading andtrailing edges of the word line pulse may match the correspondingleading and trailing edges of the bit line pulse.

FIG. 5B illustrates various applications of the embodiments of theinvention described previously with respect to FIG. 2.

Referring to FIG. 5B, in one embodiment, a square pulse may be assertedon the word line while an asymmetrical pulse may be applied on the bitline while the select line is grounded (alternatively the bit line maybe grounded while the select line is ramped negative). As illustrated,the word line pulse is asserted over the time period t_(WL), which islonger than the time duration t_(BL) of the asymmetric pulse asserted onthe bit line. The bit line may be asserted after the word line isasserted for a given pulse and similarly, the bit line voltage may beramped down prior to trailing edge of the word line pulse.

In various embodiments, the voltage of the bit line V_(BL) comprises aninitial fast portion over which the potential is quickly increased tothe peak program/erase voltage. In various embodiments, the voltage ofthe bit line V_(BL) may be decreased from the peak voltage ratherquickly to an intermediate voltage. Subsequently, the bit line voltageV_(BL) is decreased slowly, for example, at a rate lower than about 100mV/μs.

The asymmetric pulse illustrated in FIG. 5B is similar to the programpulse described with respect to FIG. 2B. Embodiments of the inventionmay also include the asymmetric pulses described in FIGS. 2A, and 2C-2F.

FIG. 6, which includes FIGS. 6A-6B, illustrates timing diagrams of eraseoperations highlighting the erase pulses at a word line andcorresponding bit line and/or select line, wherein FIG. 6A illustrates aconventional erase pulse and wherein FIG. 6B illustrates an erase pulsein accordance with embodiments of the invention.

Similar to the program pulse, the bit line voltage for the erase pulseis triggered after asserting the word line voltage. As illustrated inFIG. 6A, a conventional erase pulse may be programmed by asserting theword line and bit line simultaneously. FIG. 6B illustrates one exampleof the various applications of the embodiments of the inventiondescribed previously with respect to FIG. 3.

In accordance with an embodiment of the invention illustrated in FIG.6B, which illustrates one example of implementing the erase pulsedescribed with respect to FIG. 3B, the erase pulse is applied at the bitline after asserting the word line pulse. As described previously, theerase pulse rapidly decreases to the peak erase voltage, after which itdrops quickly to an intermediate voltage, and then slowly decays over along time. In one embodiment, the erase voltage may exponentially decayas described previously.

FIG. 7, which includes FIGS. 7A-7B, illustrates a memory cell andcorresponding program/erase operation in accordance with alternativeembodiment of the invention.

FIG. 7A illustrates a memory cell array having a memory cell comprisinga transistor and a memory unit in accordance with an embodiment of theinvention. As described previously with respect to FIG. 4, the memorycell 15 includes an access device 100 and a memory unit 10 disposedbetween a first node 1 (e.g., anode) and a second node 2 (e.g.,cathode). The first node 1 is coupled to the select line SL while thesecond node 2 is coupled to a bit line BL through an access device 100.The gate of the access device 100 is coupled to a word line and may beoperated through the word line driver 110. The other plate of thecapacitor 122 not connected to the column select transistor 121 iscoupled to a ground potential.

As illustrated, each column of the memory cell array may be coupled to acolumn select transistor 121 and a capacitor 122. The capacitor 122 maybe configured to generate the asymmetric pulse as will be describedfurther using FIG. 7B.

FIG. 7B illustrates a program/erase asymmetric pulse generated using thememory cell array described in FIG. 7A. The program/erase operationbegins by opening the column select transistor 121 by asserting a columnselect voltage (V₃) at the gate node 3 of the column select transistor121. Thus, the potential at the bit line charges the capacitor 122 whenthe column select voltage is asserted. This potential charges thecapacitor 122 as at this time the access device 100 is not turned on.

As illustrated in FIG. 7B, the access device 100 is turned on byasserting a potential pulse on the word line. Next, the word linepotential is asserted such that the leading edge of the word linevoltage pulse coincides with the trailing edge of the column selectvoltage pulse. Thus, the bit line voltage is not directly applied to thememory unit 10. Rather, after the column select voltage shuts out thebit line voltage, the capacitor 122 discharges producing a potential atthe second node 2 of the memory unit 10. The discharge from thecapacitor 122 reduces exponentially and therefore the resultingpotential at the cathode node 3 has a pulse with a fast ramp up, a firstportion with a fast ramp down, and a second portion characterized by aslow exponential decay. The fast ramp up is a result of timing thecolumn select voltage to coincide with the word line voltage while thefirst portion and the second portion of the ramp down arise from thedischarge of the capacitor 122.

In various embodiments, the potential at the second node 2 (V₂), whichis the cathode node of the memory unit 10, may vary according to thefollowing equation. V₂(t)=PV×(1−exp(−t/((R₁₀+R₁₀₀)×C))), where PV is thepeak voltage, t is the time, C is the capacitance of the capacitor 122and R₁₀ is the resistance of the memory unit 10 and R₁₀₀ is the on stateresistance of the access device 100. In various embodiments, thecapacitance of the capacitor 122 may be configured such that thecapacitor 122 discharges completely prior to the end of the word linepulse. In one or more embodiments, the time period of the word linepulse t_(WL) is less than the product of resistance of the memory unit10 and the capacitance of the capacitor 122.

FIG. 8, which includes FIGS. 8A and 8B, illustrates various memory cellarray implementing embodiments of the invention.

A memory cell array 200 may be formed using the memory unit 10implementing the various embodiments described above. The memory unit 10may be formed as described in FIG. 1 and/or 4.

In one embodiment illustrated in FIG. 8A, a memory cell array 200 may beformed from the memory cell 15 comprising an access device 100 and amemory unit 10 as described previously with respect to FIG. 4 andoperationally with respect to FIGS. 5-7.

In an alternative embodiment illustrated in FIG. 8B, the memory cellarray 200 may be implemented as a cross-point memory array, for example,as a stacked memory array. The memory unit 10 may include a switchingdevice, e.g., a diode, and a resistor within the same device in one suchembodiment. Such arrays may also be used to form logic devices in someembodiments. The memory unit 10 is coupled between a first plurality oflines 301 and a second plurality of lines 302. The first and the secondplurality of lines 301 and 302 may be perpendicular to each other. Thememory unit 10 may be coupled to a first line of the first plurality oflines 301 in a first metal level to a first line of the second pluralityof lines 302 in a metal level vertically above or below the first metallevel.

FIG. 9, which includes FIGS. 9A-9B, illustrates a memory deviceimplementing embodiments of the invention.

Referring to FIG. 9A, the memory device comprises a memory cell array200 (e.g., as described in FIG. 8), access circuits 210, andprogram/erase circuits 220. The memory cell array 200 may comprise aplurality of memory units 10 as described previously. The accesscircuits 210 provide electrical connections to the memory cell array 200so that the memory units 10 may be programmed, erased, and read. Theaccess circuits 210 may be located on one or more sides of the memorycell array 200. For example, the access circuits 210 may be located onopposite sides such that the potential may be applied across the memoryunits. The access circuits 210 may comprise the word line, bit line, andselect line drivers described in FIG. 4 as an example.

The program and erase circuits 220 may provide program and erase signals(e.g., P/E₁, P/E₂) to the access circuits 210, which applies them to thememory cell array 200. The program and erase signals may include theprofiles as described in various embodiments in FIGS. 2, 3, and 5-7. Theprogram and erase signals may comprise external or internal circuits toenable generation of the asymmetric voltage pulses. In one embodiment,the program and erase circuits 220 comprises a ramp generator 221 forgenerating the asymmetric voltage pulses. The ramp generator 221 maycomprise pulse, function, or signal generators. In one embodiment, theramp generator 221 comprises a constant current source charging acapacitor so as to obtain a ramp-up and/or ramp-down, for example, asdescribed in one embodiment in FIG. 7. In one embodiment, the rampgenerator 221 comprises a comparator to cut-off the current source whena predetermined voltage is achieved. In various embodiments, the rampgenerator 221 may comprise any suitable circuits known to a personhaving ordinary skill in the art. In some embodiments, a current mirrorcircuit may be used to dynamically maintain a maximum current passingthrough the memory unit.

The peak program or erase voltage may be higher than or lower than asupply voltage. The program and erase circuits may include charge pumpcircuits for generating higher than supply voltages, or step downvoltage regulators and the like generating lower than supply voltages.The program and erase circuits may also receive one or more of theprogram and erase signals from an external circuit in some embodiments.In some embodiments, the program and erase circuits may comprise programcircuits physically separate from the erase circuits.

FIG. 9B illustrates a further embodiment of the memory device. Thememory device includes the program and erase circuits 220 and memorycell array 200 as described in FIG. 9A. The access circuits may includea column decoder 230 and a row decoder 240. In response to an addressdata, the column and the row decoders 230 and 240 may select group ofmemory cells for reading, programming, erasing. Further, the memorydevice may comprise read circuits 250 separate from the program anderase circuits 220. The read circuits 250 may include current and/orvoltage sense amplifiers. The memory device may further include aregister 260 for storing read data values from the memory cell array 200or to store data to be written into the memory cell array 200. Invarious embodiments, the register 260 may input and output data inparallel (i.e., bytes, words, and others). In some embodiments, theregister 260 may be accessed by serial data paths.

Input/output (I/O) circuits 270 may receive address values and writedata values, and output read data values. The received address valuesmay be applied to column and row decoders 230 and 240 to select memorycells. Read data from the register 260 may be output over the I/Ocircuits 270. Similarly, write data on I/O circuits 270 may be stored inregisters 260. A command decoder 290 may receive command data, which maybe passed on to the control logic 280. The control logic 280 may providesignals to control various circuits of the memory device.

While this invention has been described with reference to illustrativeembodiments, this description is not intended to be construed in alimiting sense. Various modifications and combinations of theillustrative embodiments, as well as other embodiments of the invention,will be apparent to persons skilled in the art upon reference to thedescription. As an illustration, the embodiments described in FIGS. 2-7may be combined with each other in various embodiments. It is thereforeintended that the appended claims encompass any such modifications orembodiments.

Although the present invention and its advantages have been described indetail, it should be understood that various changes, substitutions andalterations can be made herein without departing from the spirit andscope of the invention as defined by the appended claims. For example,it will be readily understood by those skilled in the art that many ofthe features, functions, processes, and materials described herein maybe varied while remaining within the scope of the present invention.

Moreover, the scope of the present application is not intended to belimited to the particular embodiments of the process, machine,manufacture, composition of matter, means, methods and steps describedin the specification. As one of ordinary skill in the art will readilyappreciate from the disclosure of the present invention, processes,machines, manufacture, compositions of matter, means, methods, or steps,presently existing or later to be developed, that perform substantiallythe same function or achieve substantially the same result as thecorresponding embodiments described herein may be utilized according tothe present invention. Accordingly, the appended claims are intended toinclude within their scope such processes, machines, manufacture,compositions of matter, means, methods, or steps.

What is claimed is:
 1. A method of operating a memory cell comprising aresistive switching device having a first terminal and a second terminaland an access device having a first access terminal and a second accessterminal, the second access terminal being coupled to the first terminalof the resistive switching device, the method comprising: applying aselect pulse at a gate of a select transistor having a first node and asecond node, the first node coupled to the first access terminal of theaccess device, wherein the second node is coupled to a bit linepotential node; charging a capacitor having a first plate and a secondplate, the first plate coupled to the first node of the selecttransistor and to the first access terminal of the access device duringthe select pulse; activating the access device after charging thecapacitor; and discharging the charged capacitor through the resistiveswitching device, wherein the select transistor is activated anddeactivated with a first pulse, wherein the access device is activatedwith a second pulse.
 2. The method of claim 1, wherein the trailing edgeof the first pulse coincides with the leading edge of the second pulse.3. The method of claim 1, wherein the select transistor is activated anddeactivated with a first pulse, wherein the access device is activatedwith a second pulse, and wherein the second pulse is longer than aproduct of the capacitance of the capacitor and a resistance of theresistive switching device.
 4. The method of claim 1, wherein theresistive switching device comprises a conductive bridging memory. 5.The method of claim 1, further comprising deactivating the selecttransistor.
 6. The method of claim 1, further comprising deactivatingthe select transistor after activating the access device.
 7. Asemiconductor device comprising: a two terminal resistive switchingdevice having a first terminal and a second terminal and having a firststate and a second state; an access device having a first accessterminal and a second access terminal coupled to the first terminal ofthe resistive switching device; a capacitor coupled between a first nodeand a second node, the first node coupled to the first access terminal;and a select transistor having a first source/drain terminal and asecond source/drain terminal, the first source/drain terminal of theselect transistor coupled to the first node, wherein the semiconductordevice is configured to generate a signal for changing the state of thetwo terminal resistive switching device from the first state to thesecond state by charging and/or discharging the capacitor, wherein thesignal is part of a program or an erase operation, part of a readoperation, part of a forming operation, part of a refresh operation, orpart of an auto disturb operation.
 8. The device of claim 7, wherein thesignal is part of a program or an erase operation.
 9. The device ofclaim 7, wherein the signal is part of a read operation, part of aforming operation, part of a refresh operation, or part of an autodisturb operation.
 10. The device of claim 7, wherein the signalcomprises a pulse comprising: a first ramp from a first voltage to asecond voltage over a first time period, a second ramp from the secondvoltage to a third voltage over a second time period, and a third rampfrom the third voltage to a fourth voltage over a third time period, thesecond ramp and the third ramp having an opposite slope to the firstramp.
 11. The device of claim 10, wherein a sum of the first time periodand the second time period is less than the third time period.
 12. Thedevice of claim 10, wherein the first time period is less than 0.1 timesa total time period of the pulse, wherein the second time period is lessthan 0.1 times a total time period of the pulse, and wherein the thirdtime period is at least 0.7 times a total time period of the pulse. 13.The device of claim 10, wherein the first ramp comprises a linear or anexponential change from the first voltage to the second voltage, whereinthe second ramp comprises an exponential change from the second voltageto the third voltage, wherein the third ramp comprises a linear or anexponential change from the third voltage to the fourth voltage.
 14. Thedevice of claim 10, wherein the pulse is applied between the firstterminal and the second terminal.
 15. The device of claim 7, wherein thesecond node is coupled to a ground potential, wherein the secondsource/drain terminal of the select transistor is coupled to a bit line,wherein the second terminal of the resistive switching device is coupledto a select line.
 16. A semiconductor device comprising: a two terminalresistive switching device having a first terminal and a second terminaland having a first state and a second state; an access device having afirst access terminal and a second access terminal coupled to the firstterminal of the resistive switching device; a capacitor coupled betweena first node and a second node, the first node coupled to the firstaccess terminal; and a select transistor having a first source/drainterminal and a second source/drain terminal, the first source/drainterminal of the select transistor coupled to the first node, wherein thesecond terminal of the resistive switching device is coupled to a selectline, wherein the semiconductor device is configured to generate asignal for changing the state of the two terminal resistive switchingdevice from the first state to the second state by charging ordischarging the capacitor.
 17. The device of claim 16, wherein thesecond node is coupled to a ground potential.
 18. The device of claim16, wherein the second source/drain terminal of the select transistor iscoupled to a bit line.
 19. The device of claim 16, wherein the signal ispart of a program or an erase operation.
 20. The device of claim 16,wherein the signal is part of a read operation, part of a formingoperation, part of a refresh operation, or part of an auto disturboperation.
 21. The device of claim 16, wherein the signal comprises apulse comprising: a first ramp from a first voltage to a second voltageover a first time period, a second ramp from the second voltage to athird voltage over a second time period, and a third ramp from the thirdvoltage to a fourth voltage over a third time period, the second rampand the third ramp having an opposite slope to the first ramp.
 22. Thedevice of claim 21, wherein a sum of the first time period and thesecond time period is less than the third time period.
 23. The device ofclaim 21, wherein the first time period is less than 0.1 times a totaltime period of the pulse, wherein the second time period is less than0.1 times a total time period of the pulse, and wherein the third timeperiod is at least 0.7 times a total time period of the pulse.
 24. Thedevice of claim 21, wherein the first ramp comprises a linear or anexponential change from the first voltage to the second voltage, whereinthe second ramp comprises an exponential change from the second voltageto the third voltage, wherein the third ramp comprises a linear or anexponential change from the third voltage to the fourth voltage.
 25. Thedevice of claim 21, wherein the pulse is applied between the firstterminal and the second terminal.
 26. The device of claim 16, whereinthe second node is coupled to a ground potential, wherein the secondsource/drain terminal of the select transistor is coupled to a bit line,wherein the second terminal of the resistive switching device is coupledto a select line.